Etch report 14/10/04

Cesar Baxter cbaxter at
Fri Oct 15 01:59:07 PDT 2004

AMTetch    Shutdown for low dc bias

Drytek#1   *   

Drytek#2   *

Drytek#4   *

Lampoly    *

Lamsi      Not installed

Gasonic    * 

Matrix     *

MRC        *

PQuest     *

P5000      Clamp fingers for are on order for chamber A. Chamber B,C and
           D are ok to use.


STSetch    *

STShrm     Process qual in progress

* Ready for use

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