Etch report 14/10/04

Cesar Baxter cbaxter at snf.stanford.edu
Fri Oct 15 01:59:07 PDT 2004


AMTetch    Shutdown for low dc bias

Drytek#1   *   


Drytek#2   *


Drytek#4   *


Lampoly    *


Lamsi      Not installed


Gasonic    * 


Matrix     *


MRC        *


PQuest     *


P5000      Clamp fingers for are on order for chamber A. Chamber B,C and
           D are ok to use.

           

STSetch    *


STShrm     Process qual in progress


* Ready for use



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