Etch Group morning equipment status: 12/12/2005

Elmer Enriquez eenriquez at snf.stanford.edu
Tue Dec 13 00:00:21 PST 2005


*        Etch Group - Morning Equipment Status Report
*
*12/13/2005 12:01 am*

  

*Etch Equipment :*
 

Equipment
	Status
	Comments
AMTetcher
	UP
	
Drytek 1
	UP
	
Drytek 2
	UP
	
Drytek 4
	UP
	
Gasonics
	UP
	
Lampoly
	Down
	System still does not boot up.  Currently suspect VME controller and 
/or hard drive + control.
What has been done to date.
1) Repaired cause of water leak.
2) Wet cleaned the chamber.
3) Replaced damaged DC power supply.
4) Attempted to start-up the system with spare VME  board ,hard drive  
and controller (parts
condition was unknown).
5) Ordered new VME board.  Should arrive 12/2.
-- VME did not fix the problem.
Field service believes the CPU board is bad.  Ordered CPU board.

Lam Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	UP 	
PQuest
	UP
	
STSetcher
	UP
	
STSetcher 2
	UP
	

*
Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	Down
	Bad dc power supplies.  They should be in by Wed. 
AG 4100
	Start-up
	Stillll waiting for the final permit.  Running tool in "Test" mode
RTAag
	UP 	
RTAGaAs
	UP
	
Wafersaw
	UP 	




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