Etch Status Report 3/24/05

Elmer Enriquez eenriquez at snf.stanford.edu
Thu Mar 24 16:57:04 PST 2005


*Etch Group -  Morning Equipment Status Report 9:00 am*
  

*Etch Equipment*
 

Equipment
	Status
	Comments
AMTetcher
	UP
	
Drytek 1
	UP
	
Dryteck 2
	UP
	
Drytek 4
	UP
	
Gasonics
	UP
	
Lampoly
	Down
	Dummy wafer is stuck inside. Also the exit load lock external door is 
leaking
Lamp Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	UP
	
PQuest
	UP
	
STSetcher
	UP
	
STSetcher 2
	N/A
	Process start-up

*Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	UP
	Silicide tray is currently installed.
AG 4100
	N/A
	Start-up.  Waiting for the installation permit.
RTAag
	UP
	
RTAGaAs
	N/A
	Start-up.  Needs to be checked out by the processs engineer before power up
Wafersaw
	UP
	


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