Etch equipemnt status report 3/31/05

Cesar Baxter cbaxter at snf.stanford.edu
Thu Mar 31 17:34:59 PST 2005


   Etch Group - Afternoon equipment status report
                                                 3/31/05 5:00pm

  

Etch Equipment :
 

 Equipment
               Status
                                                           Comments
  AMTetcher
                 UP

   Drytek 1
                 UP

   Drytek 2
                 UP

   Drytek 4
                 UP

   Gasonics
                 UP

   Lampoly
                 UP

    Lam Si
                N/A
                       Not installed
    Matrix
                 UP

     MRC
                 UP

     P5000
                 UP

    PQuest
                 UP

  STSetcher 
                 UP

  STSetcher 2
                 Not
               Released
                       Process start-up. 



Miscellaneous Equipment:

   Equipment
                 Status
                                                           Comments
    AG 4108
                   UP
                         Silicide tray is currently installed.  Will
install oxidation tray at 2:00 PM
    AG 4100
                  N/A
                         Start-up.  Waiting for the installation permit.
     RTAag
                   UP

    RTAGaAs
                  N/A
                         Start-up.  Needs to be checked out by the
processs engineer before power up
    Wafersaw
                   UP



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