Etch Group morning equipment status: 5/16/2005

Elmer Enriquez eenriquez at snf.stanford.edu
Mon May 16 08:09:00 PDT 2005


*        Etch Group - Morning Equipment Status Report
*
*5/16/2005 8:15 am*

  

*Etch Equipment :*
 

Equipment
	Status
	Comments
AMTetcher
	UP
	Need to clean the viewport
Drytek 1
	UP
	
Drytek 2
	UP
	
Drytek 4
	UP
	
Gasonics
	UP
	
Lampoly
	Down
	HBr is not available.  HBr gas panel leak.

    * Completed gas panel re-build.
    * Completed HBr sensor test
    * Gas panel is installed
    * HBr cylinder is installed
    * Passed 24 hour pressure test

----------------------------------------------------

    * Need to replace gas sensors with the proper sensors.  Scheduled to
      be installed on Tuesday.

Lam Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	Problem
	Ch. C is down ; HBr is not available.   See Lampoly comments.
PQuest
	UP
	
STSetcher
	UP
	
STSetcher 2
	Not Released
	Process start-up.

*
Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	UP
	Oxication tray installed
AG 4100
	N/A
	Start-up.  Waiting for the installation permit.

    * Cycled 50 wafers running an N2 recipe.
    * Completed pyrometer calibration.
    * Completed exhaust connection.
    * Completed lamp calibration.
    * All calibrations have been completed .

-----------------------------------------------------------------------------------------------------------------

    * Installed a temporary oxygen cylinder.
    * Copied anneal and oxidation recipes from the AG4108

RTAag
	UP
	
RTAGaAs
	UP
	
Wafersaw
	UP
	




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