ETCH REPORT 1/03/06

Ceasar Baxter cbaxter at snf.stanford.edu
Tue Jan 3 14:54:20 PST 2006


*        Etch Group - Post-Shutdown Equipment Status Report
*
*01/03/06 as of 2:30pm today*

  

*Etch Equipment :*
 

Equipment
	Status
	Comments
AMTetcher
	UP
	Wet cleaned the chamber.  Replaced ardel parts.  Attempted to fix the 
"manometer fail" alarm by replacing the TC gauge (readout is very noisy 
during pumpdown).  Looked for loose connections but did not help. Might 
be a bad controller.  The current work-around to the problem is to 
silence the alarm and then pressing RUN again.
Drytek 1
	UP
	Changed pump oil.
Drytek 2
	UP
	Changed pump oil.
Drytek 4
	UP
	Changed pump oil
Gasonics
	UP
	
Lampoly
	Down
	System still does not boot up.  Currently suspect VME controller and 
/or hard drive + control.
What has been done to date.
1) Repaired cause of water leak.
2) Wet cleaned the chamber.
3) Replaced damaged DC power supply.
4) Attempted to start-up the system with spare VME  board ,hard drive  
and controller (parts
condition was unknown).
5) Ordered new VME board.  Should arrive 12/2.
-- VME did not fix the problem.
Field service believes the CPU board is bad. 
PCB due to arrive tomorrow.

Lam Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	DOWN
	Gas cyclinder's change BCL3,Cl2 and NF3.  System will be available 
tomorrow morning.
PQuest
	UP
	Wet cleaned the chamber .
STSetcher
	UP
	Replaced Turbo pump.  Cleaned pumping line.  Wet cleaned the chamber .  
Replaced DI water resin cartridge.  Replaced back-up batteries.
STSetcher 2
	UP
	Wet cleaned the chamber.  The system was shutdown when I came in on 
12/30.  Restarted the system and ran O2 clean. 

*
Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	Down
	Still troubleshooting boot up problem.
AG 4100
	Start-up
	Stillll waiting for the final permit.
RTAag
	UP 	
RTAGaAs
	UP
	
Wafersaw
	UP 	

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