Equipment Status Report

Ceasar Baxter cbaxter at snf.stanford.edu
Mon Jan 9 15:25:01 PST 2006


* Etch Group - Equipment Status Report **01/09/06 as of 2:45pm*

  

*Etch Equipment :*
 

Equipment
	Status
	Comments
AMTetcher
	Yellow
Light
	  Out of NF3, the new cylinder due to arrive on Jan 23/06.
Drytek 1
	UP
	
Drytek 2
	UP
	
Drytek 4
	UP
	
Gasonics
	UP
	
Lampoly
	UP
	

Lam Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	Yellow
Light
	Chamber C is offline, out of NF3 gas. Chamber A and B are ok to use
PQuest
	UP
	
STSetcher
	UP
	
STSetcher 2
	UP
	

*
Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	Down
	System is power on, but the flat aligner is not working. Still 
troubleshooting.
AG 4100
	Start-up
	Stillll waiting for the final permit.
RTAag
	UP 	
RTAGaAs
	UP
	
Wafersaw
	UP 	

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