Equipment Report

Cesar Baxter cbax at stanford.edu
Mon Jan 30 08:35:23 PST 2006


*        Etch Group - Status of etch equipment as of 8:30am 01/30/06*

  

*Etch Equipment :Status*
 

Equipment
	Status
	Comments
AMTetcher
	UP
	
Drytek 1
	UP
	
Drytek 2
	UP
	
Drytek 4
	UP
	
Gasonics
	UP
	
Lampoly
	UP
	

Lam Si
	N/A
	Not installed
Matrix
	UP
	
MRC
	UP
	
P5000
	UP 	
PQuest
	UP
	
STSetcher
	UP
	
STSetcher 2
	Down
	Bad backing pump. Pump has been send out for repair. ETA at this time.

*
Miscellaneous Equipment:*

Equipment
	Status
	Comments
AG 4108
	UP
	Process qual in progress
AG 4100
	Start-up
	Stillll waiting for the final permit.
RTAag
	UP 	
RTAGaAs
	UP
	
Wafersaw
	UP 	





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