Etch Equipment status 5/15/06
Cesar M Baxter
cbax at stanford.edu
Mon May 15 09:58:08 PDT 2006
Etch Equipment: Status as of 5/15/06 @10:00am
Amtetcher- UP, replaced three broken wafer holder clips.
Drytek#4- Shutrdown, will not pump down below 300mt, currently trouble
shooting the tool.
Gasonic - UP, adjusted and level sender load arm.
Lampoly - UP
Xactix - UP
Matrix - UP
MRC - UP
P5000 - UP, vented chamber B and removed broke wafer chips and also,
adjusted clamping force.
PQuest - UP
AG4108 - UP
AG4100 - UP
Wafersaw- Shutdown, problem with the theata initialization.
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