From nchen at snf.stanford.edu  Wed Dec  5 06:21:33 2001
From: nchen at snf.stanford.edu (nchen at snf.stanford.edu)
Date: Dec 5, 2001 6:21:33 PM
Subject: Problem evalign 2001-12-05 18:21:32: Can not take mask out
Message-ID: <mailman.158.1357938352.25704.evalign-pcs@snf.stanford.edu>

Mask vacume senor problem, after insert mask, always keep waiting. Can not undo to take mask out.



From nchen at snf.stanford.edu  Wed Dec  5 06:22:53 2001
From: nchen at snf.stanford.edu (nchen at snf.stanford.edu)
Date: Dec 5, 2001 6:22:53 PM
Subject: Shutdown evalign 2001-12-05 18:22:52: can not take mask out
Message-ID: <mailman.159.1357938352.25704.evalign-pcs@snf.stanford.edu>

always keep waiting after insert mask, can not undo to take mask out



From vilanova at snf.stanford.edu  Thu Dec  6 07:56:17 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 6, 2001 7:56:17 AM
Subject: Problem evalign 2001-12-05 18:21:32: Can not take mask out
Message-ID: <mailman.160.1357938352.25704.evalign-pcs@snf.stanford.edu>

System Rebooted, tested, working ok
Please remember to clean your mask before you use the tool.



From vilanova at snf.stanford.edu  Thu Dec  6 07:57:22 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 6, 2001 7:57:22 AM
Subject: Shutdown evalign 2001-12-05 18:22:52: can not take mask out
Message-ID: <mailman.161.1357938352.25704.evalign-pcs@snf.stanford.edu>

system rebooted, tested it, working ok
Please Clean your mask before you use the Machine.



From pzwahlen at snf.stanford.edu  Wed Dec 12 11:45:06 2001
From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu)
Date: Dec 12, 2001 11:45:06 PM
Subject: Problem evalign 2001-12-12 23:45:06: wec problem. Wafer and mask are not referenced properly
Message-ID: <mailman.162.1357938352.25704.evalign-pcs@snf.stanford.edu>

When I started to align my wafer with the mask, I noticed that on one side the wafer was already in contact with the mask. So that part of the wafer got rubbed against the mask when aligning.



From martinez at snf.stanford.edu  Thu Dec 13 08:32:52 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Dec 13, 2001 8:32:52 AM
Subject: Problem evalign 2001-12-12 23:45:06: wec problem. Wafer and mask are not referenced properly
Message-ID: <mailman.163.1357938352.25704.evalign-pcs@snf.stanford.edu>

checked system wec, cycled test wafers. no problem found