Problem evalign 2001-12-12 23:45:06: wec problem. Wafer and mask are not referenced properly

pzwahlen at snf.stanford.edu pzwahlen at snf.stanford.edu
Wed Dec 12 11:45:06 PST 2001


When I started to align my wafer with the mask, I noticed that on one side the wafer was already in contact with the mask. So that part of the wafer got rubbed against the mask when aligning.




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