From igonzalez at snf.stanford.edu  Sun Feb 11 10:04:50 2001
From: igonzalez at snf.stanford.edu (igonzalez at snf.stanford.edu)
Date: Feb 11, 2001 10:04:50 AM
Subject: Comment evalign 2001-02-11 10:04:49: 
Message-ID: <mailman.70.1357938351.25704.evalign-pcs@snf.stanford.edu>

kept giving vaccum sensor error?????



From igonzalez at snf.stanford.edu  Sun Feb 11 10:15:46 2001
From: igonzalez at snf.stanford.edu (igonzalez at snf.stanford.edu)
Date: Feb 11, 2001 10:15:46 AM
Subject: Problem evalign 2001-02-11 10:15:45: 
Message-ID: <mailman.71.1357938351.25704.evalign-pcs@snf.stanford.edu>

possible problem gives vaccum sensor error ???



From ericp at snf.stanford.edu  Sun Feb 11 08:12:39 2001
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Feb 11, 2001 8:12:39 PM
Subject: Problem evalign 2001-02-11 20:12:38: wedge not working
Message-ID: <mailman.72.1357938351.25704.evalign-pcs@snf.stanford.edu>

You can drive a truck through the gap this thing
leaves between the wafer and the mask, esp 
on the left side.  It's like millimeters, when it's 
supposed to be 30 micron.  
At first, the mask wouldn't load (vacuum error).  Finally, 
after half a dozen retries, it loads.  Problem may have been
due to wedge problem too (if it can't get mask parallel
to holder, then it can't pull the vacuum?). 



From vilanova at snf.stanford.edu  Mon Feb 12 08:35:23 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Feb 12, 2001 8:35:23 AM
Subject: Problem evalign 2001-02-11 10:15:45: 
Message-ID: <mailman.73.1357938351.25704.evalign-pcs@snf.stanford.edu>

System Reseted, No vacuum Problem found after that



From vilanova at snf.stanford.edu  Mon Feb 12 10:27:48 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Feb 12, 2001 10:27:48 AM
Subject: Problem evalign 2001-02-11 20:12:38: wedge not working
Message-ID: <mailman.74.1357938351.25704.evalign-pcs@snf.stanford.edu>

sytem rebooted , tested working ok , ready to use 



From mahnaz at snf.stanford.edu  Mon Feb 12 01:09:46 2001
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Feb 12, 2001 1:09:46 PM
Subject: Problem evalign 2001-02-12 13:09:45: vacuum sensor error
Message-ID: <mailman.75.1357938351.25704.evalign-pcs@snf.stanford.edu>




From dhelqaq at snf.stanford.edu  Wed Feb 14 09:31:17 2001
From: dhelqaq at snf.stanford.edu (dhelqaq at snf.stanford.edu)
Date: Feb 14, 2001 9:31:17 AM
Subject: Shutdown evalign 2001-02-14 09:31:17: vacuum sensor error-cannot load mask
Message-ID: <mailman.76.1357938351.25704.evalign-pcs@snf.stanford.edu>