Shutdown evalign 2001-01-16 12:11:57: optics stuck

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Jan 16 12:11:58 PST 2001


while moving to a saved optics position, the optics jammed and the software won't let me exit from the optic store window. I have a mask and wafer stuck in the machine.




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