From martinez at snf.stanford.edu  Mon Mar 12 03:10:01 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Mar 12, 2001 3:10:01 PM
Subject: Shutdown evalign 2001-02-14 09:31:17: up
Message-ID: <mailman.77.1357938351.25704.evalign-pcs@snf.stanford.edu>

wec unit has been relaced and tested. ready for use.



From martinez at snf.stanford.edu  Mon Mar 12 03:11:09 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Mar 12, 2001 3:11:09 PM
Subject: Problem evalign 2001-02-12 13:09:45: up
Message-ID: <mailman.78.1357938351.25704.evalign-pcs@snf.stanford.edu>

wec unit has been replaced and tested.



From dopalsky at snf.stanford.edu  Tue Mar 13 01:19:52 2001
From: dopalsky at snf.stanford.edu (dopalsky at snf.stanford.edu)
Date: Mar 13, 2001 1:19:52 AM
Subject: Problem evalign 2001-03-13 01:19:51: 
Message-ID: <mailman.79.1357938351.25704.evalign-pcs@snf.stanford.edu>

Vacuum sensor error after setup of mask



From dopalsky at snf.stanford.edu  Tue Mar 13 01:20:38 2001
From: dopalsky at snf.stanford.edu (dopalsky at snf.stanford.edu)
Date: Mar 13, 2001 1:20:38 AM
Subject: Problem evalign 2001-03-13 01:20:36: vacuum sensor errpr
Message-ID: <mailman.80.1357938351.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Tue Mar 13 08:48:55 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 13, 2001 8:48:55 AM
Subject: Problem evalign 2001-03-13 01:20:36: vacuum sensor errpr
Message-ID: <mailman.81.1357938351.25704.evalign-pcs@snf.stanford.edu>

I've tested it this morning and I did not get any vacuum error
 messages.



From vilanova at snf.stanford.edu  Tue Mar 13 08:51:02 2001
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mar 13, 2001 8:51:02 AM
Subject: Problem evalign 2001-03-13 01:19:51: Tested it Working Ok
Message-ID: <mailman.82.1357938351.25704.evalign-pcs@snf.stanford.edu>

I tested it , and I  did not get any vacuum error messages , 
please notify us if this happens again.  



From hector at snf.stanford.edu  Mon Mar 19 02:43:33 2001
From: hector at snf.stanford.edu (hector at snf.stanford.edu)
Date: Mar 19, 2001 2:43:33 AM
Subject: Shutdown evalign 2001-03-19 02:43:32: vacuum sensor error-no mask load
Message-ID: <mailman.83.1357938351.25704.evalign-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Mon Mar 19 11:12:38 2001
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Mar 19, 2001 11:12:38 AM
Subject: Shutdown evalign 2001-03-19 02:43:32: 
Message-ID: <mailman.84.1357938351.25704.evalign-pcs@snf.stanford.edu>

not a machine problem. chuck was not centered within the
mask loading area.  loaded test mask, cycled wafers. ok to use.