From mbadi at snf.stanford.edu Thu Nov 1 04:46:01 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Nov 1, 2001 4:46:01 PM Subject: Shutdown evalign 2001-11-01 16:45:59: per mahnaz's instructions Message-ID: From vilanova at snf.stanford.edu Fri Nov 2 02:59:06 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 2, 2001 2:59:06 PM Subject: Shutdown evalign 2001-11-01 16:45:59: per mahnaz's instructions Message-ID: Changing status to problem From vilanova at snf.stanford.edu Fri Nov 2 03:00:08 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 2, 2001 3:00:08 PM Subject: Problem evalign 2001-10-31 22:48:28: evaligner problem Message-ID: Still has intermitent Mask plate problem. available for use. From vilanova at snf.stanford.edu Fri Nov 2 03:01:28 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Nov 2, 2001 3:01:28 PM Subject: Problem evalign 2001-11-02 15:01:26: Intermitent problem Message-ID: Intermitent mask plate problem, available for use. From hector at snf.stanford.edu Tue Nov 6 03:48:15 2001 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Nov 6, 2001 3:48:15 AM Subject: Shutdown evalign 2001-11-06 03:48:12: maskholder is stuck! Message-ID: From martinez at snf.stanford.edu Thu Nov 8 03:03:14 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 8, 2001 3:03:14 PM Subject: Shutdown evalign 2001-11-06 03:48:12: maskholder is stuck! Message-ID: replaced tsa home sensor. cycled test wafers. ready for use. From martinez at snf.stanford.edu Thu Nov 8 03:03:28 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Nov 8, 2001 3:03:28 PM Subject: Problem evalign 2001-11-02 15:01:26: Intermitent problem Message-ID: problem cleared