From heibel at snf.stanford.edu Thu Oct 4 07:33:57 2001 From: heibel at snf.stanford.edu (heibel at snf.stanford.edu) Date: Oct 4, 2001 7:33:57 AM Subject: Shutdown evalign 2001-10-04 07:33:55: tray won't move out Message-ID: After loading mask, screen commands said "move tray out" however tray was never realeased andwill not move out. I was afraid to exit b/c it gives the you are leaving the machine in an undefined state message. From vilanova at snf.stanford.edu Thu Oct 4 07:50:59 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 4, 2001 7:50:59 AM Subject: Shutdown evalign 2001-10-04 07:33:55: tray won't move out Message-ID: Sys Re-Booted , Tested it, Ok to Use From junghwa at snf.stanford.edu Thu Oct 4 06:53:08 2001 From: junghwa at snf.stanford.edu (junghwa at snf.stanford.edu) Date: Oct 4, 2001 6:53:08 PM Subject: Problem evalign 2001-10-04 18:53:06: wafer sticks to mask Message-ID: From martinez at snf.stanford.edu Thu Oct 4 09:24:25 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 4, 2001 9:24:25 PM Subject: Problem evalign 2001-10-04 18:53:06: wafer sticks to mask Message-ID: initialized system, could not duplicate problem. From mbadi at snf.stanford.edu Mon Oct 8 09:31:17 2001 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Oct 8, 2001 9:31:17 PM Subject: Problem evalign 2001-10-08 21:31:16: mask holder doesn't lift for substrate ittermittently Message-ID: this problem doesn't always occur: when the system asks for the substrate, the mask holder is in the "down" position thus making it impossible to load the substrate. the way around the problem is to lift the mask holder to make room for the substrate. quitting the program and restarting it takes care of the problem for awhile. From vilanova at snf.stanford.edu Tue Oct 9 08:10:16 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 9, 2001 8:10:16 AM Subject: Problem evalign 2001-10-08 21:31:16: mask holder doesn't lift for substrate ittermittently Message-ID: This problem doesnt occur very often , I think we are having a Software problem, The Tech will be here on thursday so we will asking about it . fo now you have to lift the mask loader by hand to load the subtrate. From sguan at snf.stanford.edu Thu Oct 11 09:15:57 2001 From: sguan at snf.stanford.edu (sguan at snf.stanford.edu) Date: Oct 11, 2001 9:15:57 PM Subject: Problem evalign 2001-10-11 21:15:56: Can't take mask holder out Message-ID: After explosure, I can't get wafers out either. I have to lift up the whole chuck to get wafer out. From sguan at snf.stanford.edu Fri Oct 12 01:01:47 2001 From: sguan at snf.stanford.edu (sguan at snf.stanford.edu) Date: Oct 12, 2001 1:01:47 AM Subject: Comment evalign 2001-10-12 01:01:47: It seems working fine Message-ID: It may be possible the user before me did not turn the loading stage fully before next operation. The chuck was stuck in a unstable position. Somehow, I tried it again this time it worked. From vilanova at snf.stanford.edu Fri Oct 12 07:55:31 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 12, 2001 7:55:31 AM Subject: Problem evalign 2001-10-11 21:15:56: Can't take mask holder out Message-ID: we are having a Software problem, We have contacted The vendor and they will come out next week. The Only thing you can Do is Pick up the Plate Holder while you take out the tray manually. From franklin at snf.stanford.edu Fri Oct 12 12:22:05 2001 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Oct 12, 2001 12:22:05 PM Subject: Problem evalign 2001-10-12 12:22:04: blocked wafer loading Message-ID: I loaded my mask and then was trying to load my first wafer. When I tried to rotate the tray in I found it was blocked by the mask or the chuck that is holding the mask. I've encountered this problem before about two weeks ago and Mario was able to fix it for me right away. But apparently it is a recurring problem and maybe we should look into the problem a little deeper. It doesn't happen every time but I have found several other lab members who've encountered this same problem. thanks nate From griffin at snf.stanford.edu Fri Oct 12 01:46:50 2001 From: griffin at snf.stanford.edu (griffin at snf.stanford.edu) Date: Oct 12, 2001 1:46:50 PM Subject: Problem evalign 2001-10-12 12:22:04: blocked wafer loading Message-ID: From junghwa at snf.stanford.edu Fri Oct 12 10:06:52 2001 From: junghwa at snf.stanford.edu (junghwa at snf.stanford.edu) Date: Oct 12, 2001 10:06:52 PM Subject: Problem evalign 2001-10-12 22:06:52: no uv Message-ID: no UV From junghwa at snf.stanford.edu Fri Oct 12 10:07:17 2001 From: junghwa at snf.stanford.edu (junghwa at snf.stanford.edu) Date: Oct 12, 2001 10:07:17 PM Subject: Problem evalign 2001-10-12 22:07:16: No UV Message-ID: From martinez at snf.stanford.edu Mon Oct 15 11:39:39 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 15, 2001 11:39:39 AM Subject: Problem evalign 2001-10-12 22:07:16: No UV Message-ID: reignited lamp From martinez at snf.stanford.edu Mon Oct 15 11:39:56 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 15, 2001 11:39:56 AM Subject: Problem evalign 2001-10-12 22:06:52: no uv Message-ID: reignited uv lamp From dtchang at snf.stanford.edu Mon Oct 15 01:19:55 2001 From: dtchang at snf.stanford.edu (dtchang at snf.stanford.edu) Date: Oct 15, 2001 1:19:55 PM Subject: Shutdown evalign 2001-10-15 13:19:54: Moving Tray Out Message-ID: After the ev puts the chuck in contact with the mask either for wedge compensation or after hard contact on topside exposure it keeps the mask in contact with the chuck... the instructions tell you to move the tray out, but you can't since it is in contact. From martinez at snf.stanford.edu Mon Oct 15 03:39:11 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 15, 2001 3:39:11 PM Subject: Shutdown evalign 2001-10-15 13:19:54: Moving Tray Out Message-ID: checked and adjusted air pressure. ready for a try From hwi at snf.stanford.edu Tue Oct 16 12:34:24 2001 From: hwi at snf.stanford.edu (hwi at snf.stanford.edu) Date: Oct 16, 2001 12:34:24 PM Subject: Problem evalign 2001-10-16 12:34:23: wouldn't let me load mask Message-ID: as it stated From ericp at snf.stanford.edu Tue Oct 16 10:28:03 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Oct 16, 2001 10:28:03 PM Subject: Shutdown evalign 2001-10-16 22:28:01: mask plate doesn't rise Message-ID: The mask plate does not rise when it is supposed to. (As if the actuator that raises it is defective) Thanks, -Eric From vilanova at snf.stanford.edu Thu Oct 18 02:11:00 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 18, 2001 2:11:00 PM Subject: Problem evalign 2001-10-16 12:34:23: wouldn't let me load mask Message-ID: Adjustments made by vendor, tested it , working ok Ready to use. From vilanova at snf.stanford.edu Thu Oct 18 02:11:38 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 18, 2001 2:11:38 PM Subject: Shutdown evalign 2001-10-16 22:28:01: mask plate doesn't rise Message-ID: Adjustments made by vendor, Tested it, Working Ok Ready to use. From mahnaz at snf.stanford.edu Tue Oct 23 05:00:40 2001 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Oct 23, 2001 5:00:40 PM Subject: Shutdown evalign 2001-10-23 17:00:39: the system keeps getting stuck Message-ID: I reset and reset few times and every time i end up to remove the mask frame and i do not like the user to do that. From vilanova at snf.stanford.edu Wed Oct 24 08:42:50 2001 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 24, 2001 8:42:50 AM Subject: Shutdown evalign 2001-10-23 17:00:39: the system keeps getting stuck Message-ID: System working ok, tested it , working ok ready to use From jkong at snf.stanford.edu Tue Oct 30 03:51:54 2001 From: jkong at snf.stanford.edu (jkong at snf.stanford.edu) Date: Oct 30, 2001 3:51:54 PM Subject: Shutdown evalign 2001-10-30 15:51:53: Message-ID: The same problem happened again, the maskholder won't come up and let us to move the tray out when the computer instructs "move tray out". If we restart the everything and run it again, every time it got stuck at "wedge compansation" after the mask was loaded. From martinez at snf.stanford.edu Wed Oct 31 10:29:40 2001 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 31, 2001 10:29:40 AM Subject: Shutdown evalign 2001-10-30 15:51:53: ev620 Message-ID: cleaned and lubed tsa microscope rails. aligned and exposed five wafers. ready for use. From yetao at snf.stanford.edu Wed Oct 31 10:48:28 2001 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Oct 31, 2001 10:48:28 PM Subject: Problem evalign 2001-10-31 22:48:28: evaligner problem Message-ID: Suddenly didn't work anymore. seems the substrate got stuck.