Problem evalign 2001-10-08 21:31:16: mask holder doesn't lift for substrate ittermittently
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Tue Oct 9 08:10:16 PDT 2001
This problem doesnt occur very often , I think we are having a
Software problem, The Tech will be here on thursday so we
will asking about it . fo now you have to lift the mask loader
by hand to load the subtrate.
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