Problem evalign 2001-10-08 21:31:16: mask holder doesn't lift for substrate ittermittently

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Oct 9 08:10:16 PDT 2001


This problem doesnt occur very often , I think we are having a 
Software problem, The Tech will be here on thursday so we 
will asking about it . fo now you have to lift the mask loader 
by hand to load the subtrate.




More information about the evalign-pcs mailing list