Shutdown evalign 2001-10-15 13:19:54: Moving Tray Out

dtchang at snf.stanford.edu dtchang at snf.stanford.edu
Mon Oct 15 01:19:55 PDT 2001


After the ev puts the chuck in contact with the mask either for wedge compensation or after hard contact on topside exposure it keeps the mask in contact with the chuck... the instructions tell you to move the tray out, but you can't since it is in contact.




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