From mahnaz at snf.stanford.edu  Wed Dec  4 10:00:13 2002
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Dec 4, 2002 10:00:13 AM
Subject: Problem evalign 2002-11-25 10:28:08: non uniformity across the wafer
Message-ID: <mailman.238.1357938353.25704.evalign-pcs@snf.stanford.edu>

I ran a test and easily resolve 1 um line and spsce.



From mbadi at snf.stanford.edu  Thu Dec 12 08:15:59 2002
From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu)
Date: Dec 12, 2002 8:15:59 PM
Subject: Problem evalign 2002-12-12 20:15:58: backside align program missing
Message-ID: <mailman.239.1357938353.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Dec 13 10:03:17 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 13, 2002 10:03:17 AM
Subject: Problem evalign 2002-12-12 20:15:58: backside align program missing
Message-ID: <mailman.240.1357938353.25704.evalign-pcs@snf.stanford.edu>

backside alignment back on , ok to use. 



From haniff at snf.stanford.edu  Sat Dec 14 07:29:34 2002
From: haniff at snf.stanford.edu (haniff at snf.stanford.edu)
Date: Dec 14, 2002 7:29:34 PM
Subject: Problem evalign 2002-12-14 19:29:32: No UV
Message-ID: <mailman.241.1357938353.25704.evalign-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Mon Dec 16 10:06:39 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Dec 16, 2002 10:06:39 AM
Subject: Problem evalign 2002-12-14 19:29:32: No UV
Message-ID: <mailman.242.1357938353.25704.evalign-pcs@snf.stanford.edu>

replaced lamp, ready to use.