From goksen at snf.stanford.edu  Mon Feb  4 11:19:04 2002
From: goksen at snf.stanford.edu (goksen at snf.stanford.edu)
Date: Feb 4, 2002 11:19:04 AM
Subject: Problem evalign 2002-02-04 11:19:02: Mask sticks to wafer during backside alignment
Message-ID: <mailman.168.1357938352.25704.evalign-pcs@snf.stanford.edu>

Before exposure, during wafer adjustment, wafer sticks to the mask. I used soft contact but even without exposure I observed photoresist sticking to the mask.



From vilanova at snf.stanford.edu  Mon Feb  4 01:49:24 2002
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Feb 4, 2002 1:49:24 PM
Subject: Problem evalign 2002-02-04 11:19:02: Mask sticks to wafer during backside alignment
Message-ID: <mailman.169.1357938352.25704.evalign-pcs@snf.stanford.edu>

Please clean your mask before you use it, I checked the back
side aligment  and it's working ok , ready to use