Problem evalign 2002-02-04 11:19:02: Mask sticks to wafer during backside alignment

goksen at snf.stanford.edu goksen at snf.stanford.edu
Mon Feb 4 11:19:04 PST 2002


Before exposure, during wafer adjustment, wafer sticks to the mask. I used soft contact but even without exposure I observed photoresist sticking to the mask.




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