Problem evalign 2002-02-04 11:19:02: Mask sticks to wafer during backside alignment

goksen at goksen at
Mon Feb 4 11:19:04 PST 2002

Before exposure, during wafer adjustment, wafer sticks to the mask. I used soft contact but even without exposure I observed photoresist sticking to the mask.

More information about the evalign-pcs mailing list