From zyun at snf.stanford.edu  Sat May  4 01:42:32 2002
From: zyun at snf.stanford.edu (zyun at snf.stanford.edu)
Date: May 4, 2002 1:42:32 PM
Subject: Shutdown evalign 2002-05-04 13:42:30: Machine is locked
Message-ID: <mailman.174.1357938352.25704.evalign-pcs@snf.stanford.edu>

Disabled before taking the mask out, hence the machine is locked.



From martinez at snf.stanford.edu  Mon May  6 08:26:33 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: May 6, 2002 8:26:33 AM
Subject: Shutdown evalign 2002-05-04 13:42:30: Machine is locked
Message-ID: <mailman.175.1357938352.25704.evalign-pcs@snf.stanford.edu>

rebooted sys & computer. ready for use



From quickwin at snf.stanford.edu  Sat May 25 11:52:45 2002
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: May 25, 2002 11:52:45 PM
Subject: Problem evalign 2002-05-25 23:52:43: "z-movement error"
Message-ID: <mailman.176.1357938352.25704.evalign-pcs@snf.stanford.edu>

I got "z-movement error" message during si-si wafer bonding.  I could not finish work.



From martinez at snf.stanford.edu  Tue May 28 08:31:22 2002
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: May 28, 2002 8:31:22 AM
Subject: Problem evalign 2002-05-25 23:52:43: "z-movement error"
Message-ID: <mailman.177.1357938352.25704.evalign-pcs@snf.stanford.edu>

initialized system, tested in diagnostic mode. ok to use