From vilanova at snf.stanford.edu Fri Oct 11 10:19:15 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 11, 2002 10:19:15 AM Subject: Shutdown evalign 2002-10-11 10:19:14: Testing power supply Message-ID: From martinez at snf.stanford.edu Fri Oct 11 11:04:48 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 11, 2002 11:04:48 AM Subject: Shutdown evalign 2002-10-11 10:19:14: Testing power supply Message-ID: system avaliable for use. lamp power supply is in CP mode and calibrated at 9mw/cm2 From bchui at snf.stanford.edu Mon Oct 21 01:04:47 2002 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Oct 21, 2002 1:04:47 PM Subject: Problem evalign 2002-10-21 13:04:46: mask+wafer stuck inside Message-ID: machine got hung up during mask unload sequence. My mask is trapped inside; my wafer is also clinging to the bottomside of my mask. From martinez at snf.stanford.edu Mon Oct 21 01:26:23 2002 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Oct 21, 2002 1:26:23 PM Subject: Problem evalign 2002-10-21 13:04:46: mask+wafer stuck inside Message-ID: rebooted system, removed mask From wliu at snf.stanford.edu Wed Oct 30 03:56:08 2002 From: wliu at snf.stanford.edu (wliu at snf.stanford.edu) Date: Oct 30, 2002 3:56:08 AM Subject: Problem evalign 2002-10-30 03:56:08: there's no lamp power Message-ID: no lamp power after initiating machine From vilanova at snf.stanford.edu Wed Oct 30 07:56:27 2002 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Oct 30, 2002 7:56:27 AM Subject: Problem evalign 2002-10-30 03:56:08: there's no lamp power Message-ID: power supply found off , I've turned back on tested the lamp works ok , ready to use .