From patlu at snf.stanford.edu Wed Apr 9 06:37:37 2003 From: patlu at snf.stanford.edu (patlu at snf.stanford.edu) Date: Apr 9, 2003 6:37:37 PM Subject: Problem evalign 2003-04-09 18:37:37: Report Problem for evalign Message-ID: can't log in...says "Please Wait--Initialize Machine" but does nothing. From vilanova at snf.stanford.edu Thu Apr 10 07:20:59 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 10, 2003 7:20:59 AM Subject: Problem evalign 2003-04-09 18:37:37: Report Clear for evalign Message-ID: No problem found after rebooting system , ok to use. From enwang at snf.stanford.edu Mon Apr 14 01:30:44 2003 From: enwang at snf.stanford.edu (enwang at snf.stanford.edu) Date: Apr 14, 2003 1:30:44 AM Subject: Problem evalign 2003-04-14 01:30:42: Report Problem for evalign Message-ID: lamp doesn't seem to be working From vilanova at snf.stanford.edu Mon Apr 14 07:28:48 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 14, 2003 7:28:48 AM Subject: Problem evalign 2003-04-14 01:30:42: Report Clear for evalign Message-ID: Once again , someone turned off the power supply please do not touch the power supply. Ok to use now . From pindermu at snf.stanford.edu Mon Apr 14 09:34:01 2003 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Apr 14, 2003 9:34:01 PM Subject: Shutdown evalign 2003-04-14 21:34:01: Report Shutdown for evalign Message-ID: "Config error!" message by initialization (load frame was left inside?) From vilanova at snf.stanford.edu Tue Apr 15 07:18:50 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Apr 15, 2003 7:18:50 AM Subject: Shutdown evalign 2003-04-14 21:34:01: Report Clear for evalign Message-ID: Software Problem , I Initialized system and now everything is clear. Ok to use now . From lindaw at snf.stanford.edu Sun Apr 20 03:43:08 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Apr 20, 2003 3:43:08 PM Subject: Comment evalign 2003-04-20 15:43:07: right backside focus range won't go above 889 Message-ID: The right backside focus range won't go above the value of 889. The left backside focus will go to 909- 910, which is where my features are in focus on the left side. On the right, the features are starting to come into focus, but the z axis stops and won't go beyond the value of 889. I can't align my wafers. From lindaw at snf.stanford.edu Tue Apr 22 08:46:33 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Apr 22, 2003 8:46:33 AM Subject: Problem evalign 2003-04-22 08:46:31: right backside will not focus through full range Message-ID: In anodic recipe, right backside focus stops short at a value of 889. Left focus travels through full range to value of 950. My features are in focus at 908 on left side. Cannot focus on right side. Help!!!!!!!!! From lindaw at snf.stanford.edu Fri Apr 25 08:08:28 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Apr 25, 2003 8:08:28 AM Subject: Problem evalign 2003-04-25 08:08:26: Still cannot focus right b-side objective Message-ID: I still am unable to focus the right backside objective. It still stops short at 889. The left objective is fine and will focus through my feature plane all the way to 950. Left is in focus at 896. Right is barely visible at 889. From martinez at snf.stanford.edu Wed Apr 30 02:30:05 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Apr 30, 2003 2:30:05 PM Subject: Shutdown evalign 2003-04-30 14:30:05: Report Shutdown for evalign Message-ID: shutdown. bsa repair