From yyao at snf.stanford.edu  Mon Feb 17 08:19:53 2003
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Feb 17, 2003 8:19:53 PM
Subject: Problem evalign 2003-02-17 20:19:52: non-uniform exposure
Message-ID: <mailman.254.1357938353.25704.evalign-pcs@snf.stanford.edu>




From crichter at snf.stanford.edu  Tue Feb 18 09:15:21 2003
From: crichter at snf.stanford.edu (crichter at snf.stanford.edu)
Date: Feb 18, 2003 9:15:21 AM
Subject: Problem evalign 2003-02-18 09:15:20: backside illumination darker
Message-ID: <mailman.255.1357938353.25704.evalign-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Thu Feb 20 09:41:37 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Feb 20, 2003 9:41:37 AM
Subject: Problem evalign 2003-02-18 09:15:20: backside illumination darker
Message-ID: <mailman.256.1357938353.25704.evalign-pcs@snf.stanford.edu>

lamp intensity adjustment working ok. no problem found.



From martinez at snf.stanford.edu  Thu Feb 20 09:42:20 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Feb 20, 2003 9:42:20 AM
Subject: Problem evalign 2003-02-17 20:19:52: non-uniform exposure
Message-ID: <mailman.257.1357938353.25704.evalign-pcs@snf.stanford.edu>

cleaned chuck, ran resolution test. results good.



From chen0622 at snf.stanford.edu  Mon Feb 24 12:42:19 2003
From: chen0622 at snf.stanford.edu (chen0622 at snf.stanford.edu)
Date: Feb 24, 2003 12:42:19 AM
Subject: Problem evalign 2003-02-24 00:42:18: vacuum contact will scratch the PR
Message-ID: <mailman.258.1357938353.25704.evalign-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Mon Feb 24 09:43:14 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Feb 24, 2003 9:43:14 AM
Subject: Problem evalign 2003-02-24 00:42:18: vacuum contact will scratch the PR
Message-ID: <mailman.259.1357938353.25704.evalign-pcs@snf.stanford.edu>

cycled wafer in vac contact mode. no problem found