From martinez at snf.stanford.edu Tue Jan 7 03:44:40 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 7, 2003 3:44:40 PM Subject: Shutdown evalign 2003-01-07 15:44:36: optic repairs Message-ID: From mahnaz at snf.stanford.edu Tue Jan 7 05:19:28 2003 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Jan 7, 2003 5:19:28 PM Subject: Shutdown evalign 2003-01-07 15:44:36: optic repairs Message-ID: Fly Eye has been replaced. Intensity is back to normal 15 mw From yetao at snf.stanford.edu Tue Jan 7 05:44:29 2003 From: yetao at snf.stanford.edu (yetao at snf.stanford.edu) Date: Jan 7, 2003 5:44:29 PM Subject: Problem evalign 2003-01-07 17:44:28: vacuum sensor error Message-ID: From vilanova at snf.stanford.edu Wed Jan 8 07:39:07 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 8, 2003 7:39:07 AM Subject: Problem evalign 2003-01-07 17:44:28: vacuum sensor error Message-ID: I Loaded Our mask and ran Some wafers with no problem At all, Please make sure you center the chuck before you begin your process , thats one of the reasons why you get that Error message: " Vacuum Sensor Error " , Ok to use . From hansen at snf.stanford.edu Fri Jan 24 11:51:40 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Jan 24, 2003 11:51:40 AM Subject: Problem evalign 2003-01-24 11:51:39: lamp doesn't turn on Message-ID: lamp doesn't turn on during exposure. Can't expose From martinez at snf.stanford.edu Fri Jan 24 01:14:34 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 24, 2003 1:14:34 PM Subject: Problem evalign 2003-01-24 11:51:39: lamp doesn't turn on Message-ID: reignited lamp, checked intensity. 15mw/cm2 uniformity 1.35% From yyao at snf.stanford.edu Tue Jan 28 12:54:30 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jan 28, 2003 12:54:30 PM Subject: Problem evalign 2003-01-28 12:54:30: No UV Message-ID: From martinez at snf.stanford.edu Tue Jan 28 01:45:26 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jan 28, 2003 1:45:26 PM Subject: Problem evalign 2003-01-28 12:54:30: No UV Message-ID: added UV From hector at snf.stanford.edu Thu Jan 30 04:40:47 2003 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Jan 30, 2003 4:40:47 AM Subject: Problem evalign 2003-01-30 04:40:45: backside rcp: crosshair doesn't stay on mark Message-ID: bottom side objectives do not repeatably focus on the wafer or on the photomask From vilanova at snf.stanford.edu Thu Jan 30 10:41:59 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jan 30, 2003 10:41:59 AM Subject: Problem evalign 2003-01-30 04:40:45: backside rcp: crosshair doesn't stay on mark Message-ID: I Initialized the computer run a test and backside is working Fine now, Ok to use . From hector at snf.stanford.edu Fri Jan 31 03:30:05 2003 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Jan 31, 2003 3:30:05 AM Subject: Problem evalign 2003-01-31 03:30:03: back rcp: wafer & maskcheck out of focus Message-ID: You should NEVER have to readjust the focus after finding the fiducials on the mask. Currently, you find the fiducials, the system does the WEC, you re-find the fiducials, and then you go to load the wafer and it is out of focus. Sometimes the focus on the wafer is intermittent. Many times you can't even go back to maskcheck without it being out of focus too!