Problem evalign 2003-01-07 17:44:28: vacuum sensor error

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Jan 8 07:39:07 PST 2003


I Loaded Our mask and ran Some wafers with no problem 
At all, Please make sure you center the chuck before you begin
your process , thats one of the reasons why you get that Error
message:  " Vacuum Sensor Error " , Ok to use . 




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