Problem evalign 2003-01-31 03:30:03: back rcp: wafer & maskcheck out of focus

hector at snf.stanford.edu hector at snf.stanford.edu
Fri Jan 31 03:30:05 PST 2003


You should NEVER have to readjust the focus after finding the fiducials on the mask.  Currently, you find the fiducials, the system does the WEC, you re-find the fiducials, and then you go to load the wafer and it is out of focus.  Sometimes the focus on the wafer is intermittent.  Many times you can't even go back to maskcheck without it being out of focus too!




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