From alirezaa at snf.stanford.edu Sun Jun 1 01:46:53 2003 From: alirezaa at snf.stanford.edu (alirezaa at snf.stanford.edu) Date: Jun 1, 2003 1:46:53 PM Subject: Problem evalign 2003-06-01 13:46:52: Report Problem for evalign Message-ID: It keeps sending me a "vaccum sensor error" message when I want to load the wafer!!!! wasn't able to proceed any further From vilanova at snf.stanford.edu Mon Jun 2 06:51:47 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 2, 2003 6:51:47 AM Subject: Problem evalign 2003-06-01 13:46:52: Report Clear for evalign Message-ID: YOU will always get a vacuum sensor error if you dont align your mask correctly, I tried it and I couldn't repeat the problem. From mbadi at snf.stanford.edu Tue Jun 10 03:24:24 2003 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Jun 10, 2003 3:24:24 PM Subject: Problem evalign 2003-06-10 15:24:24: Report Problem for evalign Message-ID: topside.rcp is programmed for IR alignment. I can't figure out how to change it back! From mbadi at snf.stanford.edu Tue Jun 10 04:41:23 2003 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Jun 10, 2003 4:41:23 PM Subject: Problem evalign 2003-06-10 16:41:23: FIXED! Message-ID: Found the fix and changed the setting back. Please clear prlbem! Thanks. From vilanova at snf.stanford.edu Wed Jun 11 07:14:03 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 11, 2003 7:14:03 AM Subject: Problem evalign 2003-06-10 16:41:23: Report Clear for evalign Message-ID: User fixed the problem. From vilanova at snf.stanford.edu Wed Jun 11 07:14:26 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 11, 2003 7:14:26 AM Subject: Problem evalign 2003-06-10 15:24:24: Report Clear for evalign Message-ID: user fixed the problem. From harshal at snf.stanford.edu Wed Jun 18 10:15:49 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Jun 18, 2003 10:15:49 PM Subject: Problem evalign 2003-06-18 22:15:48: Report Problem for evalign Message-ID: UV light on the machine not working. was using top side recipe. From vilanova at snf.stanford.edu Thu Jun 19 07:34:31 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 19, 2003 7:34:31 AM Subject: Problem evalign 2003-06-18 22:15:48: Report Clear for evalign Message-ID: someone turned off power supply again , please do not turn off power supply. lamp is on , ok to use. From holdenli at snf.stanford.edu Sat Jun 21 10:25:42 2003 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Jun 21, 2003 10:25:42 AM Subject: Problem evalign 2003-06-21 10:25:41: Vaccum Error Mesg Message-ID: The vaccum error message kept popping on the screen after adjusting the mask. I tried and re-tried but the same error mesg appears. Unable to perform expose on my wafer. From holdenli at snf.stanford.edu Sun Jun 22 04:17:00 2003 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Jun 22, 2003 4:17:00 PM Subject: Problem evalign 2003-06-22 16:16:59: Vaccum Error Mesg Again Message-ID: Someone managed to clear this error mesg yesterday by cleaning the vaccum holes. However, this same problem occurred again. From vilanova at snf.stanford.edu Mon Jun 23 08:01:25 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 23, 2003 8:01:25 AM Subject: Problem evalign 2003-06-21 10:25:41: Report Clear for evalign Message-ID: operator error, i put my mask this morning and everything was fine , ok to use From vilanova at snf.stanford.edu Mon Jun 23 08:01:53 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 23, 2003 8:01:53 AM Subject: Problem evalign 2003-06-22 16:16:59: Report Clear for evalign Message-ID: no vacuum errors when I use the system this morning. ok to use. From sumita at snf.stanford.edu Wed Jun 25 11:59:15 2003 From: sumita at snf.stanford.edu (sumita at snf.stanford.edu) Date: Jun 25, 2003 11:59:15 AM Subject: Problem evalign 2003-06-25 11:59:14: Report Problem for evalign Message-ID: System is locked - evalign needs to be reset! From martinez at snf.stanford.edu Wed Jun 25 12:31:23 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Jun 25, 2003 12:31:23 PM Subject: Problem evalign 2003-06-25 11:59:14: Report Clear for evalign Message-ID: reset aligner, ready for use From holdenli at snf.stanford.edu Sat Jun 28 10:30:28 2003 From: holdenli at snf.stanford.edu (holdenli at snf.stanford.edu) Date: Jun 28, 2003 10:30:28 AM Subject: Problem evalign 2003-06-28 10:30:28: Vaccum Error Mesg Message-ID: Vaccum error mesg appears after mask alignment. Could be some vaccum disconnection in the mask holder. Unable to proceed further. From vilanova at snf.stanford.edu Mon Jun 30 07:42:41 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Jun 30, 2003 7:42:41 AM Subject: Problem evalign 2003-06-28 10:30:28: Report Clear for evalign Message-ID: checked system ,everything ok , no errors. operator error.