From martinez at snf.stanford.edu Thu May 1 11:46:20 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 1, 2003 11:46:20 AM Subject: Shutdown evalign 2003-04-30 14:30:05: Report Clear for evalign Message-ID: adj right bsa scope, replaced illumination led ready for use From martinez at snf.stanford.edu Thu May 1 11:46:34 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 1, 2003 11:46:34 AM Subject: Problem evalign 2003-04-25 08:08:26: Report Clear for evalign Message-ID: problem cleared From martinez at snf.stanford.edu Thu May 1 11:46:49 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 1, 2003 11:46:49 AM Subject: Problem evalign 2003-04-22 08:46:31: Report Clear for evalign Message-ID: problem cleared From erics at snf.stanford.edu Sun May 4 08:15:54 2003 From: erics at snf.stanford.edu (erics at snf.stanford.edu) Date: May 4, 2003 8:15:54 PM Subject: Problem evalign 2003-05-04 20:15:53: Report Problem for evalign Message-ID: I don't know if it was my problem but I couldn't get the alignment marks on my wafer to match the crosshairs. I checked the crosshair to mask a few times and things looked fine. I would have thought it was me but i also noticed when setting up the crosshairs that the right crosshair button was "on" when the left crosshair was moving. obviously that is not right. From vilanova at snf.stanford.edu Mon May 5 07:49:58 2003 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: May 5, 2003 7:49:58 AM Subject: Problem evalign 2003-05-04 20:15:53: Report Clear for evalign Message-ID: Sysboot , I ran the same recipe and I couldnt repeat the crosshair problem. From harshal at snf.stanford.edu Fri May 9 03:25:07 2003 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: May 9, 2003 3:25:07 PM Subject: Problem evalign 2003-05-09 15:25:07: Vaccum sensor error on evalign Message-ID: From martinez at snf.stanford.edu Mon May 12 08:54:34 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 12, 2003 8:54:34 AM Subject: Problem evalign 2003-05-09 15:25:07: Report Clear for evalign Message-ID: system is currently in use. no problem found From lindaw at snf.stanford.edu Fri May 30 07:41:23 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 30, 2003 7:41:23 AM Subject: Problem evalign 2003-05-30 07:41:22: Rt backside focus cannot travel past 892 Message-ID: I believe it is the same problem we had before with the right backside optic housing shifting in the loose sleeve. I cannot focus right side above 900, where my features are in focus on the left side. Cannot align my wafers. From martinez at snf.stanford.edu Fri May 30 10:03:50 2003 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: May 30, 2003 10:03:50 AM Subject: Problem evalign 2003-05-30 07:41:22: Report Clear for evalign Message-ID: adj right side microscope position. linda will varify tomorrow