From lian at snf.stanford.edu  Fri Oct  3 08:08:54 2003
From: lian at snf.stanford.edu (lian at snf.stanford.edu)
Date: Oct 3, 2003 8:08:54 PM
Subject: Shutdown evalign 2003-10-03 20:08:53: Report Shutdown for evalign
Message-ID: <mailman.322.1357938353.25704.evalign-pcs@snf.stanford.edu>

Lamp is off.
Machine got stuck in the middle of process (couldn't initialize after changing a mask).  Lamp didn't come on after restart.



From vilanova at snf.stanford.edu  Mon Oct  6 07:42:09 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 6, 2003 7:42:09 AM
Subject: Shutdown evalign 2003-10-03 20:08:53: Report Clear for evalign
Message-ID: <mailman.323.1357938353.25704.evalign-pcs@snf.stanford.edu>

sys reboot , tested , ok to use. 



From vilanova at snf.stanford.edu  Wed Oct  8 03:35:25 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 8, 2003 3:35:25 PM
Subject: Problem evalign 2003-09-03 14:08:46: Report Clear for evalign
Message-ID: <mailman.324.1357938353.25704.evalign-pcs@snf.stanford.edu>

BSA  Right microscope repaired. ok to use.



From mtang at snf.stanford.edu  Wed Oct  8 03:36:18 2003
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Oct 8, 2003 3:36:18 PM
Subject: Problem evalign 2003-10-08 15:36:18: Report Problem for evalign--oops
Message-ID: <mailman.325.1357938353.25704.evalign-pcs@snf.stanford.edu>

Sorry, I inadvertently cleared the last message.  Still down for BSA problem.



From vilanova at snf.stanford.edu  Wed Oct  8 03:41:14 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 8, 2003 3:41:14 PM
Subject: Problem evalign 2003-10-08 15:36:18: Report Clear for evalign
Message-ID: <mailman.326.1357938353.25704.evalign-pcs@snf.stanford.edu>

repairs completed, ok to use now :-) 



From seoung at snf.stanford.edu  Fri Oct 17 06:03:14 2003
From: seoung at snf.stanford.edu (seoung at snf.stanford.edu)
Date: Oct 17, 2003 6:03:14 PM
Subject: Problem evalign 2003-10-17 18:03:12: Report Problem for evalign
Message-ID: <mailman.327.1357938353.25704.evalign-pcs@snf.stanford.edu>

Vacuum sensor error.
 When I loaded my mask, the error appeared on the screen.
I could not proceed



From vilanova at snf.stanford.edu  Mon Oct 20 07:22:58 2003
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Oct 20, 2003 7:22:58 AM
Subject: Problem evalign 2003-10-17 18:03:12: Report Clear for evalign
Message-ID: <mailman.328.1357938354.25704.evalign-pcs@snf.stanford.edu>

operator error, checked system , I couldnt repeat the 
problem , ok to use.



From mahnaz at snf.stanford.edu  Fri Oct 31 10:59:21 2003
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 31 Oct 2003 10:59:21 -0800
Subject: Problem evalign 2003-10-31 10:59:21: poor   WEG  compensation
Message-ID: <mailman.329.1357938354.25704.evalign-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Fri Oct 31 14:34:12 2003
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 31 Oct 2003 14:34:12 -0800
Subject: Problem evalign 2003-10-31 10:59:21: poor   WEG  compensation
Message-ID: <mailman.330.1357938354.25704.evalign-pcs@snf.stanford.edu>

cleaned excess resist from wafer chuck, cleaned wec unit
adj wec contact force, cycled wafer.