Problem evalign 2003-09-03 14:08:46: right backside lens will not focus above 895

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Sep 3 02:08:48 PDT 2003


Same problem we had a couple of months ago.  The right backside lens housing was loose and had been slipping down, thus making the focal range shorter than normal. This had been remedied by EV & Mike by manually raising the lamp housing before anodic alignment of 1mm thick wafers.  This method does not seem to work anymore as the housing will not stay in the up position over the course of loading the bottom wafer. Was able to travel above 900 scale during top wafer load and align, but once the second wafer is loaded, the focus will not go above 895.




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