From vilanova at snf.stanford.edu Thu Apr 1 14:46:59 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Apr 2004 14:46:59 -0800 Subject: Comment evalign 2004-03-05 18:10:09: found with the mask "load frame" in the Message-ID: cleared comment From harshal at snf.stanford.edu Wed Apr 21 19:17:04 2004 From: harshal at snf.stanford.edu (harshal at snf.stanford.edu) Date: Wed, 21 Apr 2004 19:17:04 -0700 Subject: Problem evalign 2004-04-21 19:17:04: machine in locked stage. mask still loaded. Message-ID: From vilanova at snf.stanford.edu Thu Apr 22 07:01:00 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Apr 2004 07:01:00 -0700 Subject: Problem evalign 2004-04-21 19:17:04: machine in locked stage. mask still loaded. Message-ID: rebooted PC, stage working fine now, ready to use From vilanova at snf.stanford.edu Thu Apr 22 07:01:38 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 22 Apr 2004 07:01:38 -0700 Subject: Comment evalign 2004-04-18 11:44:17: megasonic cleaner not working Message-ID: checked megasonic cleaner , cycled a wafer , ok to use. From vmaterna at snf.stanford.edu Fri Apr 23 08:02:15 2004 From: vmaterna at snf.stanford.edu (vmaterna at snf.stanford.edu) Date: Fri, 23 Apr 2004 08:02:15 -0700 Subject: Problem evalign 2004-04-23 08:02:14: initialization fails Message-ID: initialization failed twice before letting me start working From vilanova at snf.stanford.edu Fri Apr 23 08:15:48 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Apr 2004 08:15:48 -0700 Subject: Problem evalign 2004-04-23 08:02:14: initialization fails Message-ID: false alarm , user took care of it :-) From lindaw at snf.stanford.edu Fri Apr 23 11:37:26 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 23 Apr 2004 11:37:26 -0700 Subject: Problem evalign 2004-04-23 11:37:26: In ANODIC rcpe, wafers are in cont, no sep Message-ID: The machine puts by bottom wafer into contact when it is supposed to be separated. When I press the cont/sep button on the panel or by moving the cursor over the cont/sep button on screen, I get a z-axis error window. Wafers stay in contact. Also, I noticed that after focussing on the top wafers, when I press continue to bring up the crosshairs, the left image goes out of focus. I can refocus to align the cross hairs, then the image stays pretty much in focus through the rest of the alignment process. Maybe something is wrong with the WEC? From vilanova at snf.stanford.edu Fri Apr 23 13:29:36 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Apr 2004 13:29:36 -0700 Subject: Problem evalign 2004-04-23 11:37:26: In ANODIC rcpe, wafers are in cont, no sep Message-ID: Reseted wec pressure , tested , ok to use From lindaw at snf.stanford.edu Fri Apr 30 07:47:29 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 30 Apr 2004 07:47:29 -0700 Subject: Comment evalign 2004-04-30 07:47:28: the good bond chuck has crud burned onto it Message-ID: From lindaw at snf.stanford.edu Fri Apr 30 09:34:21 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 30 Apr 2004 09:34:21 -0700 Subject: Comment evalign 2004-04-30 09:34:21: The other bond chuck is missing a nut on one flag Message-ID: The secondary bond chuck is missing a nut on one of the flags. The primary chuck has been cleaned by Mike M.