From hansj at snf.stanford.edu Wed Aug 4 20:51:03 2004 From: hansj at snf.stanford.edu (hansj at snf.stanford.edu) Date: Wed, 4 Aug 2004 20:51:03 -0700 Subject: Problem evalign SNF 2004-08-04 20:51:02: error1 Message-ID: after I login, when it shows "pull the tray out". I pulled it out, and it gave me ERROR1on the screen and could not work. From vilanova at snf.stanford.edu Thu Aug 5 07:11:53 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Aug 2004 07:11:53 -0700 Subject: Problem evalign SNF 2004-08-04 20:51:02: error1 Message-ID: Last User left mask plate outside and not at the parked position. tested a few times , ok to use. From mahnaz at snf.stanford.edu Fri Aug 6 11:38:56 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2004 11:38:56 -0700 Subject: Problem evalign SNF 2004-08-06 11:38:55: I tested the system 3 times Message-ID: Every time Vac. system error and after loding the wafer it come s to contact . Scratches the wafer, should be seperated when loding the wafer. From martinez at snf.stanford.edu Fri Aug 6 13:21:11 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 6 Aug 2004 13:21:11 -0700 Subject: Problem evalign SNF 2004-08-06 11:38:55: I tested the system 3 times Message-ID: initialized system, logged on/off several times could not duplicate prob From mahnaz at snf.stanford.edu Fri Aug 6 16:50:54 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 6 Aug 2004 16:50:54 -0700 Subject: Problem evalign SNF 2004-08-06 16:50:53: initialization error and Message-ID: You need to watch for seperation GAP first wafer goes in is already in contact. From crichter at snf.stanford.edu Tue Aug 10 14:16:41 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 10 Aug 2004 14:16:41 -0700 Subject: Problem evalign SNF 2004-08-10 14:16:40: initialization error and cont/sep light does not light during wafer alignment stage sometimes Message-ID: From martinez at snf.stanford.edu Tue Aug 10 14:31:08 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 10 Aug 2004 14:31:08 -0700 Subject: Problem evalign SNF 2004-08-10 14:16:40: initialization error and cont/sep light does not light during wafer alignment stage sometimes Message-ID: already listed as problem From martinez at snf.stanford.edu Thu Aug 12 17:03:35 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 12 Aug 2004 17:03:35 -0700 Subject: Shutdown evalign SNF 2004-08-12 17:03:34: shutdown evalign Message-ID: down to F/S. From mahnaz at snf.stanford.edu Fri Aug 13 15:12:16 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2004 15:12:16 -0700 Subject: Shutdown evalign SNF 2004-08-13 15:12:15: z motor has been changed Message-ID: I ran a test and 1 um line and space resolved. From mahnaz at snf.stanford.edu Fri Aug 13 15:12:49 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2004 15:12:49 -0700 Subject: Problem evalign SNF 2004-08-06 16:50:53: initialization error and Message-ID: z motor has been replaced. From mahnaz at snf.stanford.edu Fri Aug 13 15:22:45 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2004 15:22:45 -0700 Subject: Shutdown evalign SNF 2004-08-13 15:12:15: z motor has been changed Message-ID: I ran a test and I resolved 1 um line and space. From mahnaz at snf.stanford.edu Fri Aug 13 15:23:27 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 13 Aug 2004 15:23:27 -0700 Subject: Shutdown evalign SNF 2004-08-12 17:03:34: shutdown evalign Message-ID: z motor has been changed and the system has been tested. Please report any problem you notice. From lindaw at snf.stanford.edu Sun Aug 15 14:53:42 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 15 Aug 2004 14:53:42 -0700 Subject: Problem evalign SNF 2004-08-15 14:53:42: in anodic recipe, WEC problems lots of shift Message-ID: ran some fused silica wafers through the anodic recipe. There were huge shifts of image from cross hair during top wafer WEC. Also, after bottom wafer WEC and pre-align, left side of wafers much farther apart than right. When trying to align, both top and bottom wafer shift when moving the bottom wafers, so they are in contact somehow. I made sure that the load chuck was centered to the bond chuck. After clamping wafers and removing chuck, wafers were indeed centered on the chuck. I checked the back of the wafer load bond chuck to see if there might be something causing bad WEC, but it was smooth to the touch. O-rings on the bond chuck/mask holder frame were all in place, so I don't suspect that as the cause of the shift at WEC. You may not get good results if you use this to align Si wafers for bonding or backside align. From malekos at snf.stanford.edu Fri Aug 20 00:16:29 2004 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Fri, 20 Aug 2004 00:16:29 -0700 Subject: Problem evalign SNF 2004-08-20 00:16:28: Missing alignment pin in Mask holder Message-ID: From jgarate at snf.stanford.edu Fri Aug 20 11:46:37 2004 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Fri, 20 Aug 2004 11:46:37 -0700 Subject: Problem evalign SNF 2004-08-20 11:46:37: Shift when using eutectic recipe Message-ID: When using eutectic recipe in the step before clamping wafers it shifts bottom wafer to the left. From dhum at snf.stanford.edu Sun Aug 22 20:57:09 2004 From: dhum at snf.stanford.edu (dhum at snf.stanford.edu) Date: Sun, 22 Aug 2004 20:57:09 -0700 Subject: Problem evalign SNF 2004-08-22 20:57:08: one pin on mask holder missing Message-ID: Hi, One of the pins on the mask holder frame was missing. I was still able to align my mask. David. From vilanova at snf.stanford.edu Mon Aug 23 06:59:25 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 06:59:25 -0700 Subject: Problem evalign SNF 2004-08-22 20:57:08: one pin on mask holder missing Message-ID: this was reported earlier. From vilanova at snf.stanford.edu Mon Aug 23 09:42:40 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 09:42:40 -0700 Subject: Problem evalign SNF 2004-08-20 00:16:28: Missing alignment pin in Mask holder Message-ID: mask holder pin replaced. From vilanova at snf.stanford.edu Mon Aug 23 09:44:05 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 09:44:05 -0700 Subject: Problem evalign SNF 2004-08-15 14:53:42: in anodic recipe, WEC problems lots of shift Message-ID: should be bonder problem . From vilanova at snf.stanford.edu Mon Aug 23 09:44:16 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 23 Aug 2004 09:44:16 -0700 Subject: Problem evalign SNF 2004-08-20 11:46:37: Shift when using eutectic recipe Message-ID: should be bonder problem . From crichter at snf.stanford.edu Fri Aug 27 18:43:10 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 27 Aug 2004 18:43:10 -0700 Subject: Problem evalign SNF 2004-08-27 18:43:10: computer crashed....mask is stuck Message-ID: From dhum at snf.stanford.edu Fri Aug 27 19:08:25 2004 From: dhum at snf.stanford.edu (dhum at snf.stanford.edu) Date: Fri, 27 Aug 2004 19:08:25 -0700 Subject: Comment evalign SNF 2004-08-27 19:08:25: evalign okay Message-ID: Started the computer and took out the mask. David. From vilanova at snf.stanford.edu Mon Aug 30 07:15:16 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Aug 2004 07:15:16 -0700 Subject: Problem evalign SNF 2004-08-27 18:43:10: computer crashed....mask is stuck Message-ID: User Initialized System , Ok to use. From vilanova at snf.stanford.edu Mon Aug 30 07:15:34 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Aug 2004 07:15:34 -0700 Subject: Comment evalign SNF 2004-08-27 19:08:25: evalign okay Message-ID: User Initialized Pc , Ok to use.