Problem evalign SNF 2004-08-06 11:38:55: I tested the system 3 times

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Aug 6 11:38:56 PDT 2004


Every time Vac. system error and after loding the wafer it come s to contact . Scratches the wafer, should be seperated when 
loding the wafer.




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