Shutdown evalign SNF 2004-08-12 17:03:34: shutdown evalign

martinez at snf.stanford.edu martinez at snf.stanford.edu
Thu Aug 12 17:03:35 PDT 2004

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Previous message: Problem evalign SNF 2004-08-10 14:16:40: initialization error and cont/sep light does not light during wafer alignment stage sometimes
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