From sanli at snf.stanford.edu  Fri Dec 10 11:41:58 2004
From: sanli at snf.stanford.edu (sanli at snf.stanford.edu)
Date: Fri, 10 Dec 2004 11:41:58 -0800
Subject: Shutdown evalign SNF 2004-12-10 11:41:54: machine locked
Message-ID: <mailman.471.1357938355.25704.evalign-pcs@snf.stanford.edu>

Even in contact left side cannot focus on both the substrate
and the mask. That is, there is still quite a bit of separation.
Alignment is not possible. On top of that, the machine is locked
and does not want to give back my mask. Help..



From martinez at snf.stanford.edu  Fri Dec 10 14:32:25 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 10 Dec 2004 14:32:25 -0800
Subject: Shutdown evalign SNF 2004-12-10 11:41:54: machine locked
Message-ID: <mailman.472.1357938355.25704.evalign-pcs@snf.stanford.edu>

reset system - ok now



From martinez at snf.stanford.edu  Fri Dec 10 14:32:54 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 10 Dec 2004 14:32:54 -0800
Subject: Problem evalign SNF 2004-11-12 14:58:38: Focusing problem
Message-ID: <mailman.473.1357938355.25704.evalign-pcs@snf.stanford.edu>

adj wec/exp pressure cycled two wafers ready to use