Shutdown evalign SNF 2004-12-10 11:41:54: machine locked

sanli at sanli at
Fri Dec 10 11:41:58 PST 2004

Even in contact left side cannot focus on both the substrate
and the mask. That is, there is still quite a bit of separation.
Alignment is not possible. On top of that, the machine is locked
and does not want to give back my mask. Help..

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