From mahnaz at snf.stanford.edu  Tue Feb  3 18:24:38 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 3 Feb 2004 18:24:38 -0800
Subject: Problem evalign 2004-01-22 22:08:59: Wafer to wafer alignment not working
Message-ID: <mailman.348.1357938354.25704.evalign-pcs@snf.stanford.edu>

right bottom optic changed, wrong oring was on the frame
which actualy caused leak, replaced.
Check the system works fine.



From aeonia at snf.stanford.edu  Tue Feb 24 19:00:32 2004
From: aeonia at snf.stanford.edu (aeonia at snf.stanford.edu)
Date: Tue, 24 Feb 2004 19:00:32 -0800
Subject: Problem evalign 2004-02-24 19:00:32: no exposure beam
Message-ID: <mailman.349.1357938354.25704.evalign-pcs@snf.stanford.edu>

Exposure beam does not light.



From vilanova at snf.stanford.edu  Wed Feb 25 07:53:53 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 25 Feb 2004 07:53:53 -0800
Subject: Problem evalign 2004-02-24 19:00:32: no exposure beam
Message-ID: <mailman.350.1357938354.25704.evalign-pcs@snf.stanford.edu>

someone turned off the power suppy , please do not touch
power supply . ok to use