Problem evalign 2004-01-22 22:08:59: Wafer to wafer alignment not working

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Tue Feb 3 18:24:38 PST 2004


right bottom optic changed, wrong oring was on the frame
which actualy caused leak, replaced.
Check the system works fine.




More information about the evalign-pcs mailing list