From martinez at snf.stanford.edu Mon Jan 5 15:04:08 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 5 Jan 2004 15:04:08 -0800 Subject: Problem evalign 2003-12-08 15:25:01: system beeps while exposing Message-ID: replaced lamp From martinez at snf.stanford.edu Tue Jan 6 16:51:43 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 6 Jan 2004 16:51:43 -0800 Subject: Problem evalign 2003-12-02 07:21:34: right scan optics can not move Message-ID: top side alignment microscope assembly has been replaced and tested. a minor problem remains in the form of a 2.0um resolution limitation on 1.0um 3612 resist. this problem is being addressed From haniff at snf.stanford.edu Tue Jan 6 23:40:43 2004 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Tue, 6 Jan 2004 23:40:43 -0800 Subject: Problem evalign 2004-01-06 23:40:42: top left objective Message-ID: It seems like the top left objective is reaching it's "limit" position early. It is hitting it's limit a good inch from the mask edge. This may be intermittant . From martinez at snf.stanford.edu Wed Jan 7 09:31:18 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 7 Jan 2004 09:31:18 -0800 Subject: Problem evalign 2004-01-06 23:40:42: top left objective Message-ID: adj tsa xl limit. tested xl & rl . ready for use From mahnaz at snf.stanford.edu Thu Jan 8 11:24:43 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 8 Jan 2004 11:24:43 -0800 Subject: Problem evalign 2004-01-08 11:24:43: Report Problem for evalign Message-ID: I have ran more wafers this morning and not happy with the result so 5 um and less do not use the system. I am not able to resolve 5 um annd less uniformly across the wafers. From mahnaz at snf.stanford.edu Fri Jan 9 11:53:44 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 9 Jan 2004 11:53:44 -0800 Subject: Problem evalign 2004-01-08 11:24:43: Report Problem for evalign Message-ID: The problem was with my mask , I have confimed that with ks as well. We still have little issue with the WEC unit, the wec bellows are ordered. Please start using the system mean time there will be an intermitent problem with resolving 2 um and less. From daneman at snf.stanford.edu Thu Jan 22 22:08:59 2004 From: daneman at snf.stanford.edu (daneman at snf.stanford.edu) Date: Thu, 22 Jan 2004 22:08:59 -0800 Subject: Problem evalign 2004-01-22 22:08:59: Wafer to wafer alignment not working Message-ID: Tried wafer to wafer alignment 4 times and all came out grosslymisaligned (20-200um). It's possible there may be a vacuum problem. Please check out the problem, we have a deadline coming up. Thanks.