Problem evalign 2003-12-02 07:21:34: right scan optics can not move

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Jan 6 16:51:43 PST 2004


top side alignment microscope assembly has been
replaced and tested. a minor problem remains in the form of
a 2.0um resolution limitation on 1.0um 3612 resist. this 
problem is being addressed




More information about the evalign-pcs mailing list