Problem evalign 2004-01-08 11:24:43: Report Problem for evalign

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Thu Jan 8 11:24:43 PST 2004


I have ran more wafers this morning and not happy with the result so 5 um and less do not use the system. I am not able to resolve 5 um annd less uniformly across the wafers.




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