Problem evalign 2004-01-22 22:08:59: Wafer to wafer alignment not working

daneman at snf.stanford.edu daneman at snf.stanford.edu
Thu Jan 22 22:08:59 PST 2004


Tried wafer to wafer alignment 4 times and all came out grosslymisaligned (20-200um). It's possible there may be a vacuum
problem. Please check out the problem, we have a deadline
coming up.
Thanks.




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