From mahnaz at snf.stanford.edu  Wed Mar  3 15:43:27 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 3 Mar 2004 15:43:27 -0800
Subject: Problem evalign 2004-03-03 15:43:27: power supply bipping during exposure
Message-ID: <mailman.351.1357938354.25704.evalign-pcs@snf.stanford.edu>

needs adjustment



From coolchip at snf.stanford.edu  Thu Mar  4 01:25:44 2004
From: coolchip at snf.stanford.edu (coolchip at snf.stanford.edu)
Date: Thu, 4 Mar 2004 01:25:44 -0800
Subject: Comment evalign 2004-03-04 01:25:43: Improper Exit?
Message-ID: <mailman.352.1357938354.25704.evalign-pcs@snf.stanford.edu>

After logout, the machine still has a little noise.



From haniff at snf.stanford.edu  Thu Mar  4 10:21:02 2004
From: haniff at snf.stanford.edu (haniff at snf.stanford.edu)
Date: Thu, 4 Mar 2004 10:21:02 -0800
Subject: Problem evalign 2004-03-04 10:21:01: Large Gap Alignment
Message-ID: <mailman.353.1357938354.25704.evalign-pcs@snf.stanford.edu>

Mask is shifting from Crosshair position, after substrate is loaded.



From martinez at snf.stanford.edu  Thu Mar  4 13:47:02 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 4 Mar 2004 13:47:02 -0800
Subject: Problem evalign 2004-03-03 15:43:27: power supply bipping during exposure
Message-ID: <mailman.354.1357938354.25704.evalign-pcs@snf.stanford.edu>

no more bipping - calibrated lamp
CI1=15mw/cm2    uniformity = 1.0 %



From vilanova at snf.stanford.edu  Fri Mar  5 09:17:08 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 5 Mar 2004 09:17:08 -0800
Subject: Comment evalign 2004-03-04 01:25:43: Improper Exit?
Message-ID: <mailman.355.1357938354.25704.evalign-pcs@snf.stanford.edu>

lamp calibrated  no more alarm beeps. 



From mahnaz at snf.stanford.edu  Fri Mar  5 12:37:22 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Fri, 5 Mar 2004 12:37:22 -0800
Subject: Problem evalign 2004-03-04 10:21:01: Large Gap Alignment
Message-ID: <mailman.356.1357938354.25704.evalign-pcs@snf.stanford.edu>

top optic has been changed, front to back alignment has been adjusted. Large Gap alignment has been addressed.



From beckwith at snf.stanford.edu  Fri Mar  5 18:10:09 2004
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Fri, 5 Mar 2004 18:10:09 -0800
Subject: Comment evalign 2004-03-05 18:10:09: found with the mask "load frame" in the
Message-ID: <mailman.357.1357938354.25704.evalign-pcs@snf.stanford.edu>

machine



From naiqian at snf.stanford.edu  Sun Mar  7 23:59:59 2004
From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu)
Date: Sun, 7 Mar 2004 23:59:59 -0800
Subject: Problem evalign 2004-03-07 23:59:58: machine locked 
Message-ID: <mailman.358.1357938354.25704.evalign-pcs@snf.stanford.edu>

wait till stuff comes



From vilanova at snf.stanford.edu  Mon Mar  8 07:37:13 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 8 Mar 2004 07:37:13 -0800
Subject: Problem evalign 2004-03-07 23:59:58: machine locked 
Message-ID: <mailman.359.1357938354.25704.evalign-pcs@snf.stanford.edu>

reinitialized system and tested , ok to use 



From adaven at snf.stanford.edu  Wed Mar 24 18:29:42 2004
From: adaven at snf.stanford.edu (adaven at snf.stanford.edu)
Date: Wed, 24 Mar 2004 18:29:42 -0800
Subject: Problem evalign 2004-03-24 18:29:41: wafer bonded to mask
Message-ID: <mailman.360.1357938354.25704.evalign-pcs@snf.stanford.edu>

wafer is bonded to mask under hard contact (500 mbar) - correct chuck pressure (0.290) still has some photoresist (1um) stuck on mask



From vilanova at snf.stanford.edu  Thu Mar 25 08:47:03 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 25 Mar 2004 08:47:03 -0800
Subject: Problem evalign 2004-03-24 18:29:41: wafer bonded to mask
Message-ID: <mailman.361.1357938354.25704.evalign-pcs@snf.stanford.edu>

verified chuck pressure , no problem found.