From naiqian at snf.stanford.edu Wed May 5 23:05:54 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Wed, 5 May 2004 23:05:54 -0700 Subject: Problem evalign 2004-05-05 23:05:54: machine was locked Message-ID: machine was with green light. After enable it, found it was locked and the tray was out with mask frame on it. I disabled at once. From martinez at snf.stanford.edu Thu May 6 09:06:07 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 6 May 2004 09:06:07 -0700 Subject: Problem evalign 2004-05-05 23:05:54: machine was locked Message-ID: reset, ok now From sjo at snf.stanford.edu Mon May 10 17:07:46 2004 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Mon, 10 May 2004 17:07:46 -0700 Subject: Problem evalign 2004-05-10 17:07:44: EVAlign beeps continuously Message-ID: For no apparent reason EVAlign started beeping while I was working on it. It's a continuous tone that appears when EVAlign is enabled, and it disappears during wedge compensation and when EVAlign is disabled. It seems to be somehow vacuum related - maybe some bellow broke and is emitting air, leading to this continuous tone? From vilanova at snf.stanford.edu Tue May 11 08:07:17 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 May 2004 08:07:17 -0700 Subject: Problem evalign 2004-05-10 17:07:44: EVAlign beeps continuously Message-ID: I ran it a few tomes and I couldnt hear any beeps, it beeps while exposing because the lamp is old, but we will change it today. , ok to use. From lindaw at snf.stanford.edu Sat May 15 12:20:23 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 15 May 2004 12:20:23 -0700 Subject: Problem evalign 2004-05-15 12:20:22: megasonic cleaner not working again Message-ID: I checked that it was working friday afternoon, and it seemed to be ok. But now, sat afternoon, it refuses to lower the chuck and spin after the sheild goes up. I tried resetting, and putting different fused silica and silicon test wafers on the chuck, it still will not go. There is a tube leading up to the chuck that appears to be half full of water. Grrrrrrrrrrrr. : ( From vilanova at snf.stanford.edu Mon May 17 08:05:03 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 May 2004 08:05:03 -0700 Subject: Problem evalign 2004-05-15 12:20:22: megasonic cleaner not working again Message-ID: i cleaned the line, cycled 3 wafers , ok to use From vilanova at snf.stanford.edu Wed May 19 07:46:11 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 May 2004 07:46:11 -0700 Subject: Comment evalign 2004-04-30 07:47:28: the good bond chuck has crud burned onto it Message-ID: Comment CLeared. From vilanova at snf.stanford.edu Wed May 19 07:46:20 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 May 2004 07:46:20 -0700 Subject: Comment evalign 2004-04-30 09:34:21: The other bond chuck is missing a nut on one flag Message-ID: COmment CLeared. From naiqian at snf.stanford.edu Thu May 20 03:38:00 2004 From: naiqian at snf.stanford.edu (naiqian at snf.stanford.edu) Date: Thu, 20 May 2004 03:38:00 -0700 Subject: Problem evalign 2004-05-20 03:37:59: message: device is not open Message-ID: After enabled it, found the tray was out. the software could not be opened.. From vilanova at snf.stanford.edu Thu May 20 07:17:00 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 May 2004 07:17:00 -0700 Subject: Problem evalign 2004-05-20 03:37:59: message: device is not open Message-ID: no problems found after rebooting the system . Ok to use. From sjo at snf.stanford.edu Sat May 22 22:58:21 2004 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Sat, 22 May 2004 22:58:21 -0700 Subject: Problem evalign 2004-05-22 22:58:20: Vacuum Sensor Error Message-ID: I cannot use the machine. After the message "Adjust maks and press continue" I hit continue, then it says "Vacuum Sensor Error". It won't go beyond this point, which is *really* inconvenient right now. From vilanova at snf.stanford.edu Mon May 24 07:00:52 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 May 2004 07:00:52 -0700 Subject: Problem evalign 2004-05-22 22:58:20: Vacuum Sensor Error Message-ID: NO , Vacuum sensor Error Ocurred when you set up the micrometers to the right position , I couldnt repeat the problem, ready to use. From lindaw at snf.stanford.edu Mon May 24 09:58:25 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 24 May 2004 09:58:25 -0700 Subject: Problem evalign 2004-05-24 09:58:25: command bar won't load, Can't open file. Message-ID: From vilanova at snf.stanford.edu Mon May 24 10:49:50 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 May 2004 10:49:50 -0700 Subject: Problem evalign 2004-05-24 09:58:25: command bar won't load, Can't open file. Message-ID: sys booted , ok to use. From bsjung at snf.stanford.edu Wed May 26 13:23:04 2004 From: bsjung at snf.stanford.edu (bsjung at snf.stanford.edu) Date: Wed, 26 May 2004 13:23:04 -0700 Subject: Problem evalign 2004-05-26 13:23:04: initialization fail Message-ID: Initialization fails when login. From vilanova at snf.stanford.edu Wed May 26 14:12:05 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 May 2004 14:12:05 -0700 Subject: Problem evalign 2004-05-26 13:23:04: initialization fail Message-ID: re initialized system , ready to use. From quickwin at snf.stanford.edu Sun May 30 21:35:53 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sun, 30 May 2004 21:35:53 -0700 Subject: Problem evalign 2004-05-30 21:35:51: EV bond mode works poorly Message-ID: Left microscope objective is loose compared to right. Inconsistent bond alignment results from run to run. Misalignment as large as 50 micron.