Problem evalign 2004-05-15 12:20:22: megasonic cleaner not working again

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat May 15 12:20:23 PDT 2004


I checked that it was working friday afternoon, and it seemed to be ok.  But now, sat afternoon, it refuses to lower the chuck and spin after the sheild goes up.  I tried resetting, and putting different fused silica and silicon test wafers on the chuck, it still will not go.  There is a tube leading up to the chuck that appears to be half full of water.  Grrrrrrrrrrrr.  : (




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