From vilanova at snf.stanford.edu Mon Nov 1 07:17:15 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Nov 2004 07:17:15 -0800 Subject: Problem evalign SNF 2004-10-30 22:34:51: Vacuum sensor error Message-ID: operator error , I loaded my mask , exposed a couple of wafers, no problem found , ok to use. From vilanova at snf.stanford.edu Mon Nov 1 07:17:37 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Nov 2004 07:17:37 -0800 Subject: Comment evalign SNF 2004-10-30 21:51:36: vaccuum sensor error Message-ID: Operator error, I could not repeat the problem . From shott at snf.stanford.edu Tue Nov 2 13:22:00 2004 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 2 Nov 2004 13:22:00 -0800 Subject: Shutdown evalign SNF 2004-11-02 13:21:58: Please use manual interlock box ... Message-ID: Mike or Mario: There is currently a problem with the coral interlocks on this machine. If you can enable this with the manual box (so that the ON light is ON), then I've overridden the software so that it won't actually require hardware interlocking. As soon as this is enabled manually, this shutdown can be cleared and normal operation can proceed. Thanks, John From mahnaz at snf.stanford.edu Tue Nov 2 14:13:35 2004 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2004 14:13:35 -0800 Subject: Shutdown evalign SNF 2004-11-02 13:21:58: Please use manual interlock box ... Message-ID: clearing the manual interlock. From xpxie at snf.stanford.edu Tue Nov 2 22:46:52 2004 From: xpxie at snf.stanford.edu (xpxie at snf.stanford.edu) Date: Tue, 2 Nov 2004 22:46:52 -0800 Subject: Comment evalign SNF 2004-11-02 22:46:51: Now the exposure is not uniform Message-ID: Using SPR3612 and ~2 seconds exposure time on an 3-inch wafer (our usual recipe), the 2um-wide lines in the alignment markers on the left side were fully exposed while those on the the right side were not exposed at all. The uniformity of the machine might be much worse than before. From haniff at snf.stanford.edu Wed Nov 10 19:12:32 2004 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Wed, 10 Nov 2004 19:12:32 -0800 Subject: Problem evalign SNF 2004-11-10 19:12:31: lamp out Message-ID: lamp is out From vilanova at snf.stanford.edu Thu Nov 11 07:24:53 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Nov 2004 07:24:53 -0800 Subject: Comment evalign SNF 2004-11-02 22:46:51: Now the exposure is not uniform Message-ID: lamp back on ,. ok to use. From vilanova at snf.stanford.edu Thu Nov 11 07:25:07 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 11 Nov 2004 07:25:07 -0800 Subject: Problem evalign SNF 2004-11-10 19:12:31: lamp out Message-ID: lamp back on , ok to use. From flannery at snf.stanford.edu Fri Nov 12 12:42:12 2004 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Fri, 12 Nov 2004 12:42:12 -0800 Subject: Problem evalign SNF 2004-11-12 12:42:11: O-ring Missing Message-ID: On frame for mask holder. From vilanova at snf.stanford.edu Fri Nov 12 13:24:35 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Nov 2004 13:24:35 -0800 Subject: Problem evalign SNF 2004-11-12 12:42:11: O-ring Missing Message-ID: replaced missing O ring, ok to use From xpxie at snf.stanford.edu Fri Nov 12 14:58:39 2004 From: xpxie at snf.stanford.edu (xpxie at snf.stanford.edu) Date: Fri, 12 Nov 2004 14:58:39 -0800 Subject: Problem evalign SNF 2004-11-12 14:58:38: Focusing problem Message-ID: With 60um separation, the left side can only focus either to the wafer or the mask, but not both at the same time. The right side is fine. From kychen51 at snf.stanford.edu Sat Nov 20 23:06:47 2004 From: kychen51 at snf.stanford.edu (kychen51 at snf.stanford.edu) Date: Sat, 20 Nov 2004 23:06:47 -0800 Subject: Problem evalign SNF 2004-11-20 23:06:46: vacuum sensor error Message-ID: Vacuum sensor error after adjusting mask. Cleaned mask and completely exit and relogged in. Still get error after adjusting mask. This was doing topside, hard contact, 40um separation, 1.6 sec expose. chuck pressure says 0.292 if that's any help. From vilanova at snf.stanford.edu Mon Nov 22 07:05:04 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 22 Nov 2004 07:05:04 -0800 Subject: Problem evalign SNF 2004-11-20 23:06:46: vacuum sensor error Message-ID: checked system ,O rings , everything working ok no vacuum sensor errors , ok to use. From lindaw at snf.stanford.edu Mon Nov 29 11:23:57 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 29 Nov 2004 11:23:57 -0800 Subject: Problem evalign SNF 2004-11-29 11:23:56: joystick unresponsive, bottom objectives drifting Message-ID: intermittent. in anodic recipe. From vilanova at snf.stanford.edu Mon Nov 29 13:28:11 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Nov 2004 13:28:11 -0800 Subject: Problem evalign SNF 2004-11-29 11:23:56: joystick unresponsive, bottom objectives drifting Message-ID: I could not repeat teh probem after doing a hard reset , we'll keep an eye on it . From kevhuang at snf.stanford.edu Mon Nov 29 15:07:23 2004 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 29 Nov 2004 15:07:23 -0800 Subject: Problem evalign SNF 2004-11-29 15:07:08: won't initialize Message-ID: system freezes after running the topside program From martinez at snf.stanford.edu Mon Nov 29 16:12:13 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 29 Nov 2004 16:12:13 -0800 Subject: Problem evalign SNF 2004-11-29 15:07:08: won't initialize Message-ID: reset computer & machine cycled top side & anodic recipes redy for use