Problem evalign SNF 2004-11-12 14:58:38: Focusing problem

xpxie at snf.stanford.edu xpxie at snf.stanford.edu
Fri Nov 12 14:58:39 PST 2004


With 60um separation, the left side can only focus either to the wafer or the mask, but not both at the same time. The right side is fine.




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