Problem evalign SNF 2004-11-20 23:06:46: vacuum sensor error

kychen51 at snf.stanford.edu kychen51 at snf.stanford.edu
Sat Nov 20 23:06:47 PST 2004


Vacuum sensor error after adjusting mask.  Cleaned mask and completely exit and relogged in.  Still get error after adjusting mask.  This was doing topside, hard contact, 40um separation, 1.6 sec expose.
chuck pressure says 0.292 if that's any help.




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